Fourier-Based White-Light Interferometric Microscopy for Surface Topography and Spectral Imaging
1 : Laboratoire des sciences de l'ingénieur, de l'informatique et de l'imagerie
université de Strasbourg, Institut National des Sciences Appliquées - Strasbourg, Centre National de la Recherche Scientifique
2 : Institut Charles Sadron
université de Strasbourg, Institut National des Sciences Appliquées - Strasbourg, Centre National de la Recherche Scientifique
3 : Laboratory of Condensed Matter Physics, University of Picardie Jules Verne, 33 Rue Saint Leu, 80039 Amiens, France
UPJV Université Picardie Jules Verne
4 : MIDAVAINE THIERRY
Société Astronomique de France
White-light interferometric microscopy enables non-destructive, full-field measurement of surface topography and optical properties. Recording interference patterns while scanning the sample and calibrating, a hyperspectral reflectance map is generated. Using a Mirau-type interferometer with Fourier transform processing provides the spectral response of the sample with diffraction-limited lateral resolution of a few micrometers and axial sensitivity of around one nanometer. The method allows simultaneous acquisition of quantitative topography and spectral reflectance over small areas.
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